The intelligent ultrasonic precision spraying machine is mainly used for qualitative testing in scientific research laboratories, small and medium-sized production, and medium area. The entire device has a simple and elegant structure, complete functions, mainly including XYZ three-axis precision motion module, equipped with FUNSONIC's self-developed ultrasonic spraying special control system, WYSIWYG, realizing a comprehensive trajectory editing system with matching functions, and realizing the spraying function of any two-dimensional plane shape, such as rectangle, circle, triangle or curve. It can be equipped with any ultrasonic nozzle from FUNSONIC, as well as precision constant flow injection pump, digital carrier gas system, ultrasonic dispersion supply system, vacuum adsorption heating substrate and other functions.